To fabricate nanostructures of nanodevices in a cost-effective way is essential to make nanotechnology accessible to human daily life. We invent scalable and cost-effective manufacturing processes for fabricating various nanostructures to enable crucial nanotechnology. One application is to use metal-assisted chemical etching for both superhydrophobic and bio-inspired antibacterial surfaces.


纳米制造成本是决定纳米技术能否被推广到实际应用的一个关键因素。我们通过研发高通量的低成本的纳米制造技术来制造纳米结构实现纳米技术的应用。比如通过金属辅助的化学腐蚀方法,我们可以制造出超疏水的表面以及仿生学的杀菌表面。



1. Superhydrophobic Surfaces usin hierachical micro/nanostructures fabricated through silicon Bosch etching as well as metal-assisted chemical etching


2. Bio-inspired antibacterial surfaces fabricated by metal-assisted chemical etching