To fabricate nanostructures of nanodevices in a cost-effective way is essential to make nanotechnology accessible to human daily life. We invent scalable and cost-effective manufacturing processes for fabricating various nanostructures to enable crucial nanotechnology. One application is to use metal-assisted chemical etching for both superhydrophobic and bio-inspired antibacterial surfaces.


1. Superhydrophobic Surfaces usin hierachical micro/nanostructures fabricated through silicon Bosch etching as well as metal-assisted chemical etching

2. Bio-inspired antibacterial surfaces fabricated by metal-assisted chemical etching